Carbon nanotube tipped atomic force microscopy for measurement of <100 nm etch morphology on semiconductors

High Resolution Image with Multi-wall Carbon Nanotube Atomic Force Microscopy Tip (RESEARCH NOTE)

In this paper, a simple and reproducible approach for attaching the multi-wall carbon nanotubes (MWNTs) to the apex of the atomic force microscope probe has been proposed. For this purpose, the dielectrophoresis method was applied due to its simple performance, cheapness and reliability. In this method, various parameters such as voltage, frequency, concentration of carbon nanotubes solution an...

Identification of multiple oscillation states of carbon nanotube tipped cantilevers interacting with surfaces in dynamic atomic force microscopy

Nonlinear tapping dynamics of multi-walled carbon nanotube tipped atomic force microcantilevers

The nonlinear dynamics of an atomic force microcantilever (AFM) with an attached multi-walled carbon nanotube (MWCNT) tip is investigated experimentally and theoretically. We present the experimental nonlinear frequency response of a MWCNT tipped microcantilever in the tapping mode. Several unusual features in the response distinguish it from those traditionally observed for conventional tips. ...

Excimer Laser Projection Micromachining of Polyimide Thin Films Annealed at Different Temperatures - Components, Packaging, and Manufacturing Technology, Part C, IEEE Transactions on

A KrF excimer laser projection micromachining tool has been designed and implemented aiming to accomplish onestep etching with micron resolution for applications such as chip module packaging and polyimide technology in semiconductor manufacturing. Two polyimide (Probimide 7020) thin films spun on the silicon wafers are annealed at 100 C and 400 C, respectively, in order to investigate the effe...

Measuring, Shortening and Functionalizing Carbon Nanotube Tipped AFM Probes for DNA Sequencing

A method is presented to indirectly measure and shorten carbon nantoubes grown from the tips of atomic force microscope (AFM) probes. The measurement component exploits the nanotubes ability to elastically buckle and requires only those signals and actuators available on a standard AFM. The shortening operation is facilitated by electric arcing using a conducting niobium substrate. The shorteni...